半導體相關設備
UV LED 晶圓曝光機・紫外線量測
LED 型面曝光機（晶圓曝光機）、紫外線光度計 X-11 與紫外線感測頭 RCH-016／RCH-116
LED Area Exposure Unit (Wafer Exposure)
- LED UV exposure unit for wafer exposure; wavelengths 275, 265, 395 and 405 nm
- For 6-, 8- and 12-inch wafers
- Uniformity 90%, 500–2000 mJ
- Supplier: Phoseon (USA)
X-11 UV Radiometer
- Handheld or automatic measurement of UV irradiance or dose
- USB and RS232 interfaces for automated control, with data management
- One meter supports 4 sensors
- Supplier: Gigahertz-Optik (Germany)
RCH-016 UV Sensor
- UV sensor with flexible cable
- Compact, easy to mount on equipment
- Resistant to high temperature, acids and alkalis
- Supplier: Gigahertz-Optik (Germany)
RCH-116 UV Sensor
- UV sensor on a stainless steel rod
- Compact, easy to hold for measurement
- The long rod keeps the operator at a safe distance
- Supplier: Gigahertz-Optik (Germany)
